Amendment To Research Agreement

July 8, 1996


Mr. Mark S. Coburn University of California, Santa Cruz Contracts and Grants Office 399C Applied Sciences Building Santa Cruz, California 95064


Dear Mr. Coburn:


The purpose of this letter is to confirm and to reduce to writing the agreement of Amtech Systems, Inc. ("Sponsor") and The Regents of The University of California ("University") to modify the Research Agreement ("Agreement") between them dated March 2, 1994, as provided in Article 1.1 and below.


Because of delays in the performance of this project, and to provide sufficient time for the University to complete Phase II of the Photo-CVD Project as contained in the report and proposal of Roger Anderson, Ph.D dated February 27, 1996, including but not limited to completion of the work to demonstrate the potential of the NIQ and excimer lamps in various Photo-CVD processes, process development, investigation of alternative process chemistries for the deposition of silicon oxide, silicon nitride, and other materials such as tantalum penta-oxide using Excimer laser activated CVD and to possibly facilitate augmentation of the budget beyond the NIQ lamp, excimer lamp, and excimer laser phases, the Sponsor and the University hereby agree to extend the Agreement to the later of October 31, 1996, or the completion of the proposed work for Phase II.


NOW, THEREFORE, the first sentence of Article 2.1 is hereby modified to read, "The period of performance of this Agreement is March 1, 1994 through the later of October 31, 1996 or the date on which the work contemplated by the February 27, 1996 proposal for Phase II of the Photo-CVD Project has been completed and a report thereon provided to the Sponsor."


FURTHERMORE, the first sentence of Article 4.1 is hereby modified as follows: It is agreed to and understood by the parties hereto that, subject to Article 2, the total cost to the Sponso ...